Park FX200

Park FX200

The most advanced AFM for 200 mm samples

Introducing Park FX200, Park Systems' latest innovation in Atomic Force Microscopy tailored for 200 mm samples. Boasting an advanced mechanical structure that ensures a significantly lower noise floor, minimal thermal drift, and exceptional stability, the FX200 sets a new standard in precision and reliability. Its faster Z servo performance and improved high-power sample view enhance operational efficiency and imaging capabilities, while features like automatic probe recognition and probe exchange, laser beam alignment, and macro optics for full sample view simplify user experience and maximize productivity. With optical autofocus, navigation, and sequential measurements at multiple coordinates, coupled with automated AFM scan parameter settings, automated data analysis, the FX200 streamlines complex operations, making it the ideal choice for both research and industrial applications. Delivering superior performance and ease of use, Park FX200 stands poised to revolutionize nanoscale imaging and analysis, empowering scientists and engineers to achieve unprecedented insights and advancements in their fields.

Request for Quote
Explore Park Systems' AFM technology anytime, anywhere. Experience real scan scenarios and results without hardware or delays. Instant, interactive, and hassle-free — see what’s possible today. *SmartSimulator is not the actual Park AFM software, but a simplified simulation that offers a minimized experience of Park Systems’ metrology solutions.
Setup Setup Setup

Mode


Vision

wafer
Scan Config
128  256512    10242048  4096
0.20.511.522.5357102550100
Scan Area
Sample Details

  • Sample:

  • Head Mode:

  • Scan Size:

  • Scan Pixel:



Region Histogram

Line Profile

Line Histogram

About SmartAnalysis

Park SmartAnalysis™ is an atomic force microscopy image processing and data analysis software for Park AFM. It is the next generation image analytics software with powerful features and newly added automated functions. Park SmartAnalysis enables users to swiftly prepare, analyze and publish their AFM acquired images and measurements.

  • - Precise image analysis via multi-layer and line function: roughness statistical values, multiple specific areas of the histogram, etc.
  • - Effortless image processing with EZ Flatten producing optimal images
  • - High-quality 2D, 3D images, histogram, and region statistics analysis
  • - Image export and publishing without degrading the image resolution

Scanned Image

Used Mode

Sample
  • Head Mode:
  • Scan Size:
  • Scan Pixel:
Analysis Insight
it is a description it is a description it is a description it is a description it is a description it is a description it is a description it is a description it is a description it is a description it is a description it is a description
© 2025 Park Systems. All rights reserved.
© 2025 Park Systems. All rights reserved.

Intelligent Automation

It automates essential tasks including probe recognition and exchange, laser alignment, and parameter tuning, thereby boosting efficiency. It features 16 probe slots for repetitive measurements and mode transitions, reducing downtime and improving efficiency.

The Probe Identification Camera reads the QR code imprinted on the chip carrier of a new probe, displaying all pertinent information about each tip, including type, model, application, and usage. This allows for quick selection of the best probe tip for each job, ensuring accuracy and efficiency.

With automated probe exchange, replace old probes easily and safely with full automation. Featuring 16 probe slots for repetitive measurements and mode transitions, it reduces downtime and improves efficiency through rapid, autonomous probe switching.

Automatic Beam Alignment positions the laser beam onto the proper location of a cantilever and further optimizes the spot’s position on the PSPD both vertically and laterally. It shifts the X, Y, and Z axis for clearer images, with no distortion, all autonomously at the click of a button.

Simplified Operation

Advanced Region of Interest (ROI) Zooming uses a large field-of-view sample camera to display the entire 200 mm wafer, simplifying analysis by enabling quick, precise positioning. This reduces the time needed to locate target areas, from broad survey scans to detailed magnifications. Additionally, the refined optical vision delivers exceptional clarity, resolving line widths under 1 µm.

It allows predefined coordinate settings on large samples, such as 200 mm wafers or samples on multi-sample chuck, for automated execution. It supports sequential measurements including topography and advanced modes, and streamlining workflows in research and industrial environments.

Next Generation AFM Controller for High-End Products

Park FX Controller is specifically designed to augment the performance of the Park FX Series. This significant development enables advanced Piezoresponse Force Microscopy (PFM) applications, such as Contact Resonance PFM (CR-PFM) and Dual-Frequency Resonance Tracking (DFRT-PFM), without the need for additional hardware, ensuring our customers can take full advantage of the latest advancements in atomic force microscopy.

controller image
  • DFRT-PFM Without External Amplifiers
  • Enhanced Safety and Real-Time Environmental Monitoring
  • Direct Enablement of CR-PFM with Increased Tip Bias Modulation Bandwidth
  • Faster Ethernet Connectivity for Quick Data and Image Processing

Applications

Perfect for Diverse Applications