Park Nanostandard
The Calibration Standard Samples for AFM and SEM Measurements
The calibration standard samples for atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements. Manufactured by Kims Reference Corp.
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Step Height Reference (SHR-100)
SHR-100 sample consists of multiple pitches (3 ㎛, 5 ㎛, 10 ㎛) and 100 nm height. (Not certified) This sample is designed for XY and Z calibration.
Specifications
- Pitch values: 3 ㎛, 5 ㎛, 10 ㎛
- Step height: 100 nm
- Chip size: 5 mm × 5 mm
- Eatch pattern size: 1 mm × 1 mm
- Material: SiO2 on Si
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Not certified
XYZ Scale Calibrator (XSC12-100)
XSC12-100 sample consists of multiple pitches (3 ㎛, 5 ㎛, 10 ㎛, 20 ㎛) and 100 nm height. (Certified) This sample is designed for XY and Z calibration.
Specifications
- Pitch values: 3 ㎛, 5 ㎛, 10 ㎛, 20 ㎛
- Step height: 100 nm
- Chip size: 5 mm × 5 mm
- Eatch pattern size: 1 mm × 1 mm
- Material: SiO2 on Si
- Substrate: 300 mm wafer / 200 mm wafer (XSC08-100)
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
Z Scale Calibrator (ZSC12-200)
ZSC12-200 sample consists of 200 nm step height uniform bar (10 ㎛, 50 ㎛ wide). (Certified) This sample is designed for Z calibration.
Specifications
- Line widths: 10 ㎛, 50 ㎛
- Step height: 200 nm
- Chip size: 5 mm × 5 mm
- Pattern size: 1 mm × 1 mm
- Material: SiO2 on Si
- Substrate: 300 mm wafer / 200 mm wafer (ZSC08-200)
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
AFM Tip Characterizer (AFMTC)
AFMTC sample consists of 10 Multiple Narrow Trenches (10 ~ 50 nm) and a 50 nm Isolated Line. This sample is designed to evaluate the shape characterization of AFM tips.
Specifications
- Trench widths: 10 nm, 13 nm, 16 nm, 19 nm, 22 nm, 26 nm 30 nm, 35 nm,
40 nm, 50 nm - Line widths: 50 nm
- Step height: 100 nm (not certified)
- Pattern length: 4.0 mm (certified region: 3 mm from center)
- Material: Polycrystalline silicon
- Traceability: KOLAS (KRISS) traceable via ISO 17034:2016